ISO/TR TECHNICAL REPORT 12705 First edition 2011-10-15 Graphic technology Laboratory test method for chemical ghosting in lithography Technologie graphique Methode d'essai en laboratoire pour impressionfantome chimique enlithographie Reference number ISO/TR 12705:2011(E) @ISO2011 ISO/TR 12705:2011(E) COPYRIGHT PROTECTED DOCUMENT @ISO2011 electronic or mechanical, including photocopying and microfilm, without permission in writing from either Iso at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 . CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ ISO 2011 - All riahts reserved ISO/TR 12705:2011(E) Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies (IsO member bodies). The work of preparing International Standards is normally carried out through IsO non-governmental, in liaison with IsO, also take part in the work. Iso collaborates closely with the InternationalElectrotechnicalCommission(iEC)onallmattersofelectrotechnicalstandardization International Standards are drafted in accordance with the rules given in the ISO/lEc Directives, Part 2. adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. In exceptional circumstances, when a technical committee has collected data of a different kind from that which is normally published as an International Standard ("state of the art", for example), it may decide by a informative in nature and does not have to be revieweduntil the data it providesare consideredto be no longervalidoruseful. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. IsO shall not be held responsible for identifying any or all such patent rights. ISO/TR 12705 was prepared by Technical Committee ISO/TC 130, Graphic technology ia"ahts reserved ii