ISO INTERNATIONAL STANDARD 11505 First edition 2012-12-15 Surface chemical analysis General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry Analyse chimique des surfaces Modes opératoires généraux pour le d'émission optique a décharge luminescente Reference number ISO 11505:2012(E) ISO @ISO2012 ed without license from IHS Not for Resale IS0 11505:2012(E) COPYRIGHT PROTECTED DOCUMENT ISO2012 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IsO at the addressbeloworIso'smemberbodyinthecountryoftherequester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel.+41227490111 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2012 - All rights reserved Not for Resale IS0 11505:2012(E) Contents Page Foreword ..iv 1 Scope 1 2 Normative references ..1 3 Principle. ..1 4 Apparatus. ..1 4.1 Glow discharge optical emission spectrometer. .1 5 Adjusting the glow discharge spectrometer system settings .3 5.1 General .3 5.2 Setting the discharge parameters of a DC source. .4 5.3 Setting the discharge parameters of an RF source. .6 5.4 Minimum performance requirements 1 6 Sampling. .9 7 Calibration .9 7.1 General .9 7.2 Calibration specimens 9 7.3 Validation specimens 11 7.4 Determination of the sputtering rate of calibration and validation specimens. .11 7.5 Emission intensity measurements of calibration specimens .12 7.6 Calculation of calibration equations. .12 7.7 Validation of the calibration .12 7.8 Verification and drift correction 13 8 Analysis of test specimens .14 8.1 Adjusting discharge parameters .14 8.2 Setting of measuring time and data acquisition rate .14 8.3 Quantifying depth profiles of test specimens .14 9 Expression of results .15 9.1 Expression of quantitative depth profile ..15 9.2 Determination of total coating mass per unit area .15 9.3 Determination of average mass fractions. .16 10 Precision ..16 11 Test report ..16 Annex A (normative) Calculation of calibration constants and quantitative evaluation of depth profiles. .17 Annex B (informative) Suggested spectral lines for determination of given elements .31 Bibliography .33 ii e with ISt without license from IHS Not for Resale