论文标题

用于硅硅硅微流体的无膜热流传感器

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

论文作者

Ryzhkov, Vitaly V., Echeistov, Vladimir V., Zverev, Aleksandr V., Baklykov, Dmitry A., Konstantinova, Tatyana, Lotkov, Evgeny S., Ryazantcev, Pavel G., Alibekov, Ruslan Sh., Kuguk, Aleksey K., Aleksandrov, Andrey R., Krasko, Elisey S., Barbasheva, Anastasiya A., Ryzhikov, Ilya A., Rodionov, Ilya A.

论文摘要

实验室片(LOC)构成了新一代便携式分析系统的基础。 LOC允许在微流体芯片上操纵液体试剂的超低流量和多步反应,该芯片需要一种坚固而精确的仪器来控制芯片上液体的流动。但是,市售流量表似乎是独立的选项,添加了大量的死管以连接到芯片。此外,它们中的大多数不能与微流体通道相同的技术循环中制造。在这里,我们报告了无膜的微流体热流传感器(MTF),该传感器(MTFS)可以通过微通道拓扑结合到硅玻璃微流体芯片中。我们提出了一种无膜设计的设计,该设计具有从微流体通道和100毫米瓦金硅玻璃制造途径中分离出的薄膜热敏感元素。它确保MTF与腐蚀性液体的兼容性,这对于生物应用至关重要。提出了最佳灵敏度和测量范围的MTFS设计规则。描述了一种自动耐热敏感元件校准的方法。通过参考科里奥利流量传感器,对设备参数进行了数百小时的实验测试,其相对流量误差在2-30 ul/min的范围内以及次秒时间响应范围内的相对流误差小于5%。

Lab-on-a-chip (LOC) forms the basis of the new-generation portable analytical systems. LOC allows the manipulation of ultralow flows of liquid reagents and multistep reactions on a microfluidic chip, which requires a robust and precise instrument to control the flow of liquids on a chip. However, commercially available flow meters appear to be a standalone option adding a significant dead volume of tubes for connection to the chip. Furthermore, most of them cannot be fabricated within the same technological cycle as microfluidic channels. Here, we report on a membrane-free microfluidic thermal flow sensor (MTFS) that can be integrated into a silicon-glass microfluidic chip with a microchannel topology. We propose a membrane-free design with thin-film thermo-resistive sensitive elements isolated from microfluidic channels and 100 mm wafers silicon-glass fabrication route. It ensures MTFS compatibility with corrosive liquids, which is critically important for biological applications. MTFS design rules for the best sensitivity and measurement range are proposed. A method for automated thermo-resistive sensitive elements calibration is described. The device parameters are experimentally tested for hundreds of hours with a reference Coriolis flow sensor demonstrating a relative flow error of less than 5% within the range of 2-30 uL/min along with a sub-second time response.

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