论文标题
单层整合的高功率窄带微型脉冲激光器
Monolithically integrated high-power narrow-bandwidth microdisk laser
论文作者
论文摘要
集成的片上微型驾驶激光器引起了极大的关注，作为紧凑型，低激光阈值和狭窄带宽的光源。然而，在保持超纳罗带宽的同时，在高输出功率下单模式操作方面仍未解决挑战。在这项工作中，我们展示了单块化的片上单频率微电极激光器，以及通过光刻辅助化学机械蚀刻剂制造的总线波导。由于多边形耳语库模式的高Q因子在微型腔和长腔长度（例如409 um和1 mm）中形成，因此在室温下达到了狭窄的线宽为0.11 MHz，最大输出功率为62.1 UW。
Integrated on-chip microdisk lasers have attracted great attention as a light source of compact size, low lasing threshold and narrow bandwidth. However, challenges remain unresolved in terms of single mode operation at high output power while maintaining the ultra-narrow bandwidth. In this work, we demonstrate monolithically integrated on-chip single-frequency microdisk lasers coupled with bus-waveguides fabricated by photolithography assisted chemo-mechanical etching. Owing to the high-Q factor of a polygon whispering gallery mode formed in the microdisk and long cavity lengths (e.g., 409 um and 1 mm), a microdisk laser with a narrow linewidth of 0.11 MHz and a maximum output power of 62.1 uW has been achieved at room temperature.
