论文标题
带有过程诱导应变的2D异质结构中的Moiré工程
Moiré Engineering in 2D Heterostructures with Process-Induced Strain
论文作者
论文摘要
我们通过通过工艺诱导的应变工程(一种在工业硅纳米制造过程中广泛使用的技术)实施了可设计的设备级异质,报告了扭曲双层石墨烯中对Moiré超晶格干扰模式的确定性控制。通过将应力的薄膜沉积到我们的扭曲的双层石墨烯样品上,可以分别通过应力膜力(膜应力X膜厚度)和图案化的应激源几何形状来控制异质幅度和应变方向性。我们通过平面内和莫伊尔激活的声子模式变化检查应变和莫伊尔对拉曼光谱的干扰。结果支持系统的C $ _ {3} $在单轴或双轴异质的应用下,Moiré超晶格中的旋转对称性破坏和可调周期性。实验结果通过分子静态模拟和基于密度功能理论的第一原理计算来验证。这提供了一种方法,不仅可以在没有额外扭曲的情况下调整Moiré干扰,还可以通过确定性设计探索系统的途径来探索不同的范德瓦尔斯的MoiréSuperaltice对称性。
We report deterministic control over moiré superlattice interference pattern in twisted bilayer graphene by implementing designable device-level heterostrain with process-induced strain engineering, a widely used technique in industrial silicon nanofabrication processes. By depositing stressed thin films onto our twisted bilayer graphene samples, heterostrain magnitude and strain directionality can be controlled by stressor film force (film stress x film thickness) and patterned stressor geometry, respectively. We examine strain and moiré interference with Raman spectroscopy through in-plane and moiré-activated phonon mode shifts. Results support systematic C$_{3}$ rotational symmetry breaking and tunable periodicity in moiré superlattices under the application of uniaxial or biaxial heterostrain. Experimental results are validated by molecular statics simulations and density functional theory based first principles calculations. This provides a method to not only tune moiré interference without additional twisting, but also allows for a systematic pathway to explore different van der Waals based moiré superlattice symmetries by deterministic design.