论文标题

垂直的磁各向异性,在沉积的COFEB/MGO薄膜中

Perpendicular magnetic anisotropy in as-deposited CoFeB/MgO thin films

论文作者

Lou, Kaihua, Xie, Tunan, Zhao, Qianwen, Jiang, Baiqing, Xia, ChaoChao, Zhang, Hanying, Yao, Zhihong, Bi, Chong

论文摘要

在各种缓冲层上的垂直磁化铁磁膜制造,尤其是在许多新发现的自旋轨道扭矩(SOT)材料上,以构建节能的自旋轨道磁器械,这是一个长期的挑战。即使对于广泛使用的COFEB/MGO结构,垂直磁各向异性(PMA)也只能通过在300°C以上的限制缓冲层上建立在有限的缓冲层上。在这里,我们报告说,在没有通量后的情况下,可以在各种缓冲层上可靠地建立COFEB/MGO膜的PMA。进一步的结果表明,对MGO厚度的精确控制(决定了COFEB层下方的氧扩散)是获得ASEPOSESED PMA的关键。有趣的是,与先前的理解相反,解放后不会显着影响良好的pMA,但实际上,通过调节氧分布,而不是结晶度或共同和Fe-O键,实际上可以用厚的MGO层增强了不饱和的PMA。此外,我们的结果表明,氧扩散在高温下的PMA降解中也起着关键作用。这些结果提供了一种实用的方法,可以基于各种高效SOT材料来构建自旋轨道设备。

Fabrication of perpendicularly magnetized ferromagnetic films on various buffer layers, especially on numerous newly discovered spin-orbit torque (SOT) materials to construct energy-efficient spin-orbitronic devices, is a long-standing challenge. Even for the widely used CoFeB/MgO structures, perpendicular magnetic anisotropy (PMA) can only be established on limited buffer layers through post-annealing above 300 °C. Here, we report that the PMA of CoFeB/MgO films can be established reliably on various buffer layers in the absence of post-annealing. Further results show that precise control of MgO thickness, which determines oxygen diffusion in the underneath CoFeB layer, is the key to obtaining the as-deposited PMA. Interestingly, contrary to previous understanding, post-annealing does not influence the well-established as-deposited PMA significantly but indeed enhances unsaturated PMA with a thick MgO layer by modulating oxygen distributions, rather than crystallinity or Co- and Fe-O bonding. Moreover, our results indicate that oxygen diffusion also plays a critical role in the PMA degradation at high temperature. These results provide a practical approach to build spin-orbitronic devices based on various high-efficient SOT materials.

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