论文标题
WSMA的金属网状红外过滤器
Metal Mesh IR Filter for wSMA
论文作者
论文摘要
自2004年以来的全面科学运营开始以来，亚毫米阵列一直在实施计划，以扩展带宽和升级接收器和低温稳定。金属网格低通滤波器的设计以阻断红外线（IR）辐射，以减少低温器上的热载荷。通过光刻在石英晶片上制造过滤器，并涂有抗反射（AR）材料。对过滤器进行了200至400 GHz的测试，以验证其传球表演。发现测量结果与EM模拟结果非常吻合。它们在远红外（FIR）频率范围内进行了测试，以验证带外排斥。发现IR反射率约为70％，与金属阻塞的面积的百分比相对应。
Since the start of full science operations from 2004, the Submillimeter Array has been implementing plans to expand IF bandwidths and upgrade receivers and cryostats. Metal mesh low-pass filters were designed to block infrared (IR) radiation to reduce the thermal load on the cryostats. Filters were fabricated on a quartz wafer through photolithography and coated with anti-reflection (AR) material. The filters were tested from 200 to 400 GHz to verify their passband performances. The measurement results were found to be in good agreement with EM simulation results. They were tested in the far-infrared (FIR) frequency range to verify out-of-band rejection. The IR reflectivity was found to be approximately 70%, which corresponded to the percentage of the area blocked by metal.
