论文标题
在SOI上嵌入的III-V激光的整体整合
Monolithic Integration of Embedded III-V Lasers on SOI
论文作者
论文摘要
由于出色的光学设备特性和互补的金属氧化物半导体(CMOS)兼容性,硅光子整合在许多应用领域都取得了巨大成功。实现III-V激光器和单硅光子成分在单硅晶片上的整体整合被认为是超密集光子整合的长期障碍,该障碍物可以提供相当大的经济,能源效率和铸造的片上光源,尚未报告。在这里,我们演示了直接生长在沟槽的硅在绝缘子(SOI)底物上生长的嵌入INAS/GAAS量子点(QD)激光器,从而使整体构成与对接耦合的硅波导相结合。通过利用预定的SOI沟内的图案性光栅结构和通过分子束外延(MBE)独特的外延方法,可以在此类模板上实现具有外耦合硅波导的高性能INAS QD激光器。通过解决这种整体综合体系结构中的外观和制造挑战,可以在SOI上嵌入III-V激光器,并获得连续波的连续效果,最高可达85 oC。可以从对接耦合硅波导的末端测量6.8兆瓦的最大输出功率,估计的耦合效率约为-7.35 dB。此处介绍的结果提供了一种可扩展且低成本的外延方法,用于实现片上光源直接耦合到硅光子成分,以实现未来的高密度光子整合。
Silicon photonic integration has gained great success in many application fields owing to the excellent optical device properties and complementary metal-oxide semiconductor (CMOS) compatibility. Realizing monolithic integration of III-V lasers and silicon photonic components on single silicon wafer is recognized as a long-standing obstacle for ultra-dense photonic integration, which can provide considerable economical, energy efficient and foundry-scalable on-chip light sources, that has not been reported yet. Here, we demonstrate embedded InAs/GaAs quantum dot (QD) lasers directly grown on trenched silicon-on-insulator (SOI) substrate, enabling monolithic integration with butt-coupled silicon waveguides. By utilizing the patterned grating structures inside pre-defined SOI trenches and unique epitaxial method via molecular beam epitaxy (MBE), high-performance embedded InAs QD lasers with out-coupled silicon waveguide are achieved on such template. By resolving the epitaxy and fabrication challenges in such monolithic integrated architecture, embedded III-V lasers on SOI with continuous-wave lasing up to 85 oC are obtained. The maximum output power of 6.8 mW can be measured from the end tip of the butt-coupled silicon waveguides, with estimated coupling efficiency of approximately -7.35 dB. The results presented here provide a scalable and low-cost epitaxial method for realization of on-chip light sources directly coupling to the silicon photonic components for future high-density photonic integration.