论文标题
氮化硅应激微孔子检查器调制器，用于光学控制应用
Silicon nitride stress-optic microresonator modulator for optical control applications
论文作者
论文摘要
氮化硅集成平台已成功地实现了可见的红外和组件的极低波导损失，包括高性能激光器，过滤器，谐振器，稳定腔和光学频率梳子。然而，在实施低损失，硝化硅平台中低功率调节器方面的进展，同时维持平面，晶圆尺度的过程兼容性受到限制。在这里，我们报告说，在全平面，晶圆尺度硝酸硅平台中，在整合压电电动（PZT）驱动的微型环调节方面有了重大进展，该平台的光损失较低（在1550 Nm的625 um resonator中保持0.03 db/cm的较低（在1550 Nm）中，较低的阶段和数量均增加了数量的阶数，并增加了量的数量。比先前的PZT调节器的20 NW改进。调制器在整个4 GHz调谐范围内提供> 14 dB ER和710万Q，调谐效率为200 MHz/V，并提供65.1 DBHZ2/3和73.8 DBHZ2/3 IMD3 IMD3 IMD3 SFDR所需的线性性，分别为1 MHz和10 MHz和10 MHz。我们演示了两个控制应用，即PDH锁定环中的激光稳定，将激光频率噪声降低40 dB，并作为激光载体跟踪过滤器。该PZT调节器设计可以扩展到具有少量波导设计更改的超低损失硅平台中的可见光。 This integration of PZT modulation in the ultra-low loss silicon nitride waveguide platform enables modulator control functions in a wide range of visible to IR applications such as atomic and molecular transition locking for cooling, controllable optical frequency combs, low-power external cavity tunable lasers, atomic clocks, and tunable ultra-low linewidth lasers and ultra-low phase noise microwave合成器。
The silicon nitride integration platform has been successful at realizing extremely low waveguide losses across the visible to infrared and components including high performance lasers, filters, resonators, stabilization cavities, and optical frequency combs. Yet, progress towards implementing low loss, low power modulators in the silicon nitride platform, while maintaining the planar, wafer-scale process compatibility has been limited. Here we report a significant advance in integration of a piezo-electric (PZT) actuated micro-ring modulation in a fully-planar, wafer-scale silicon nitride platform, that maintains low optical loss (0.03 dB/cm in a 625 um resonator) at 1550 nm, with an order of magnitude increase in bandwidth (DC to 20 MHz 3-dB) and order of magnitude lower power consumption of 20 nW improvement over prior PZT modulators. The modulator provides a >14 dB ER and 7.1 million Q over the entire 4 GHz tuning range, a tuning efficiency of 200 MHz/V, and delivers the linearity required for control applications with 65.1 dBHz2/3 and 73.8 dBHz2/3 IMD3 SFDR at 1 MHz and 10 MHz respectively. We demonstrate two control applications, laser stabilization in a PDH lock loop, reducing laser frequency noise by 40 dB, and as a laser carrier tracking filter. This PZT modulator design can be extended to the visible in the ultra-low loss silicon nitride platform with minor waveguide design changes. This integration of PZT modulation in the ultra-low loss silicon nitride waveguide platform enables modulator control functions in a wide range of visible to IR applications such as atomic and molecular transition locking for cooling, controllable optical frequency combs, low-power external cavity tunable lasers, atomic clocks, and tunable ultra-low linewidth lasers and ultra-low phase noise microwave synthesizers.
