论文标题

底物温度对DC磁控溅射的铜氧化铜膜的光电特性的影响

Effect of substrate temperature on the optoelectronic properties of DC magnetron sputtered copper oxide films

论文作者

Koshy, Aarju Mathew, Sudha, A, Yadav, Satyesh Kumar, Swaminathan, Parasuraman

论文摘要

通过DC Magnetron溅射沉积在石英底物上,并详细检查沉积温度对光电特性的影响。扫描电子显微镜(SEM),X射线衍射(XRD)分析,拉曼光谱,UV-VIS光谱和四个探针板电阻测量分别用于表征表面形态,结构,光学,光学和电性能。沉积在室温和200至300°C之间进行。 XRD分析表明,形成的氧化物主要是cu $ _2 $ o,吸收光谱显示膜在300 nm左右的吸收边缘具有临界的吸收边缘。板电阻随着沉积温度的升高逐渐降低,从而增加了这些薄膜的电导率。还观察到的是,在300°C时,带隙从2.20 eV增加到2.35 eV。光条间隙和用温度变化的板电阻变化表明,微结构在其行为中起着至关重要的作用。这些转化特性具有巨大的技术重要性,具有多种应用,包括透明的太阳能电池制造。

Copper oxide thin films are deposited on quartz substrates by DC magnetron sputtering and the effect of deposition temperature on their optoelectronic properties is examined in detail. Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) analysis, Raman spectroscopy, UV-Vis spectroscopy, and four-probe sheet resistance measurements are used to characterize the surface morphology, structural, optical, and electrical properties respectively. Deposition is carried out at room temperature and between 200 and 300 °C. XRD analysis indicates that the oxide formed is primarily Cu$_2$O and the absorption spectra show the films have a critical absorption edge at around 300 nm. The sheet resistance gradually decreases with increase in deposition temperature thereby increasing the conductivity of these thin films. Also observed is the increase in band gap from 2.20 eV for room temperature deposition to 2.35 eV at 300 °C. The optical band gap and the variation of sheet resistance with temperature shows that the microstructure plays a vital role in their behavior. These transformation characteristics are of huge technological importance having variety of applications including transparent solar cell fabrication.

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