论文标题

使用浅碳植入的LGAD传感器的设计和测试

Design and testing of LGAD sensor with shallow carbon implantation

论文作者

Wu, Kewei, Jia, Xuewei, Yang, Tao, Li, Mengzhao, Wang, Wei, Zhao, Mei, Liang, Zhijun, da Costa, Joao Guimaraes, Fan, Yunyun, Cui, Han, Howard, Alissa, Kramberger, Gregor, Shi, Xin, Heng, Yuekun, Tan, Yuhang, Liu, Bo, Feng, Yuan, Li, Shuqi, Li, Mengran, Yu, Chengjun, Yang, Xuan, Zhai, Mingjie, Xu, Gaobo, Yan, Gangping, Zhai, Qionghua, Ding, Mingzheng, Luo, Jun, Yin, Huaxiang, Li, Junfeng

论文摘要

低增益雪崩探测器(LGADS)是带有快速电荷收集的薄传感器,结合内部增益可提供约30 ps的出色时间分辨率。高碰撞速率和随之而来的较大颗粒速率越过2028年升级的大型强子对撞机(LHC)处的探测器,将导致辐射损伤和LGADS的性能恶化。辐射损伤的主要结果是损失增益层掺杂(删除受体),这需要增加偏置电压以补偿电荷收集效率的损失,从而弥补了时间分辨率。中国科学院(CAS)高能量物理学研究所(IHEP)基于微电子研究所(IME)开发了一个过程,可以用碳丰富增益层,以减少辐射的受体去除效果。 1 MEV中子中子等效的频率为2.5 $ \ times $ 10 $^{15} $ n $ _ {eq} $/cm $ $^{2} $,这是在Atlas高粒状定时检测器(HGTD)上暴露传感器的最大通信性,IHEP-EMIM sepressere(ihep-emime sepressemence)(Ihep-emim em emem $ ime $ $ $ $ umm ime $ hep-ime n heep-ime v)电荷收集> 4 fc和时间分辨率<50 ps电压<400 v。这50 $μ$ M设备的操作电压远低于可能发生的单个事件倦怠的设备。

The low gain avalanche detectors (LGADs) are thin sensors with fast charge collection which in combination with internal gain deliver an outstanding time resolution of about 30 ps. High collision rates and consequent large particle rates crossing the detectors at the upgraded Large Hadron Collider (LHC) in 2028 will lead to radiation damage and deteriorated performance of the LGADs. The main consequence of radiation damage is loss of gain layer doping (acceptor removal) which requires an increase of bias voltage to compensate for the loss of charge collection efficiency and consequently time resolution. The Institute of High Energy Physics (IHEP), Chinese Academy of Sciences (CAS) has developed a process based on the Institute of Microelectronics (IME), CAS capability to enrich the gain layer with carbon to reduce the acceptor removal effect by radiation. After 1 MeV neutron equivalent fluence of 2.5$\times$10$^{15}$ n$_{eq}$/cm$^{2}$, which is the maximum fluence to which sensors will be exposed at ATLAS High Granularity Timing Detector (HGTD), the IHEP-IME second version (IHEP-IMEv2) 50 $μ$m LGAD sensors already deliver adequate charge collection > 4 fC and time resolution < 50 ps at voltages < 400 V. The operation voltages of these 50 $μ$m devices are well below those at which single event burnout may occur.

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