论文标题

两轴自动定位阶段的一级加速度计校准

Primary accelerometer calibration with two-axis automatic positioning stage

论文作者

Kokuyama, Wataru, Shimoda, Tomofumi, Nozato, Hideaki

论文摘要

在这项研究中,我们使用两轴定位阶段和异差激光干涉仪开发了一个自动化的多点主要加速度计校准系统。提出的系统提供了低成本,方便和自动化的多点加速度计校准,从而可以减少校准时间。定位阶段还提供了更好的定位可重复性1 UM,这是通过手动对齐不可能的。我们通过测量超过450个测量位置测量了单端加速度计的激光反射适配器的表面变形。可视化激光反射表面的变形促进了理解变形或非电线运动的影响,这是高频加速度计校准中最重要的不确定性成分之一。

In this study, we developed an automated, multipoint primary accelerometer calibration system using a two-axis positioning stage and a heterodyne laser interferometer. The proposed system offers low-cost, convenient, and automated multipoint accelerometer calibration, enabling less calibration lead time. The positioning stage also offers better positioning repeatability of 1 um, which is impossible through manual alignments. We measured the surface deformation of a laser reflection adaptor for a single-ended accelerometer by measuring more than 450 measurement positions. Visualizing the deformation of laser reflection surfaces facilitates understanding the effects of deformation or nonrectilinear motion, which are among the most significant uncertainty components in high-frequency accelerometer calibrations.

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