论文标题
硅电子乘数传感器
The Silicon Electron Multiplier Sensor
论文作者
论文摘要
硅电子倍增器(SIEM)是一种新型传感器概念,用于使用内部增益和良好的螺距来实现出色的时间和空间分辨率。与通过掺杂(LGAD,APDS)诱导增益区域的传感器相反,SIEM中的扩增是通过使用MEMS制造技术嵌入硅体内嵌入的复合电极结构中的电势差来实现的。由于预计不会在辐射损坏的情况下停用增益层,因此这种结构有望承受高达$ 10^{16} n_ {eq} $的通力。在考虑的制造过程中,研究了各种几何形状和偏置构型。研究了有效增益,传感器中的磁场,泄漏电流和崩溃条件的细胞尺寸范围在$6-15μm$的范围内。模拟表明,可以实现超过10的收益,并且在传感器中间沉积的电荷云中对诱导信号的时间结构的研究表明,与其他内部增益相似的时间分辨率可以预期。讨论了制造概念验证传感器及其后续表征的计划。
The Silicon Electron Multiplier (SiEM) is a novel sensor concept for minimum ionizing particle (MIP) detection which uses internal gain and fine pitch to achieve excellent temporal and spatial resolution. In contrast to sensors where the gain region is induced by doping (LGADs, APDs), amplification in the SiEM is achieved by applying an electric potential difference in a composite electrode structure embedded within the silicon bulk using MEMS fabrication techniques. Since no gain-layer deactivation is expected with radiation damage, such a structure is expected to withstand fluences of up to $10^{16} n_{eq}$. Various geometries and biasing configurations are studied, within the boundaries imposed by the fabrication process being considered. The effective gain, the field in the sensor, the leakage current and breakdown conditions are studied for cell sizes in the range of $6 - 15 μm$. Simulations show that gains in excess of 10 can be achieved, and studies of the time structure of the induced signals from a charge cloud deposited in the middle of the sensor show that time resolutions similar to other sensors with internal gain can be expected. Plans for the manufacture of a proof-of-concept sensor and for its subsequent characterisation are discussed.