论文标题
通过两光岩光刻制造的超高频率的微声元
Microacoustic metagratings at ultra-high frequencies fabricated by two-photon lithography
论文作者
论文摘要
最近提出的双异性声学元元为被动声波操作提供了有希望的机会,这在超高频率超声波下在平坦的声学镜头和超声成像中特别感兴趣。尽管这一事实,声学元元素从未扩展到超声成像中常见的MHz频率。最大的挑战之一是生产显微镜大小的复杂结构。由于两光子聚合,从声学超材料的角度来看,一种新型的制造技术,现在可以精确地在此频率范围内精确地生产次波长结构。但是,缩小尺寸构成了另一个挑战。增长的热量效果会导致相当大的损失,这在设计中必须考虑到。在这项工作中,我们提出了三个微声易映的设计,在2 MHz处折射正常事件波向-35 $^{\ circ} $。为了使对热效果不敏感的元素质不敏感,我们使用形状优化技术,结合了使用有限元方法离散的线性化navier-Stokes方程。我们首次报告使用两光子聚合制造的微观声学超材料,随后,在实验中,使用电容性微机械超声传感器作为源作为源,在1.8 MHz至2.2 MHz的范围内有效地验证它们作为源的电容性超声传感器。我们不仅证明了微型声学的大易体可以有效地重定向正常的入射波,尽管造成了热雾损失,而且还可以在$ -1 $ 1的衍射顺序中分配90%的传输能量。
The recently proposed bianisotropic acoustic metagratings offer promising opportunities for passive acoustic wavefront manipulation, which is of particular interest in flat acoustic lenses and ultrasound imaging at ultra-high frequency ultrasound. Despite this fact, acoustic metagratings have never been scaled to MHz frequencies that are common in ultrasound imaging. One of the greatest challenges is the production of complex structures of microscopic size. Owing to two-photon polymerization, a novel fabrication technique from the view of acoustic metamaterials, it is now possible to precisely manufacture sub-wavelength structures in this frequency range. However, shrinking in size poses another challenge; the increasing thermoviscous effects lead to considerable losses, which must be taken into account in the design. In this work we propose three microacoustic metagrating designs refracting a normally incident wave towards -35$^{\circ}$ at 2 MHz. In order to develop metaatoms insensitive to thermoviscous effects we use shape optimization techniques incorporating the linearized Navier-Stokes equations discretized with finite element method. We report for the first time microscopic acoustic metamaterials manufactured using two-photon polymerization and, subsequently, experimentally verify their effectively using a capacitive micromachined ultrasonic transducer as source and an optical microphone as a detector in a range from 1.8 MHz to 2.2 MHz. We demonstrate not just that a microacoustic metagrating can effectively redirect the normally incident wave despite the thermoviscous losses, but also that it being only 0.29$λ$ thick can allocate 90% of the transmitted energy in the $-$1st diffraction order.