论文标题
弹道石墨烯阵列用于超高压力感
Ballistic graphene array for ultra-high pressure sensing
论文作者
论文摘要
与商业使用的压力传感器相比，原子上薄的二维材料（例如石墨烯）表现出极高的压力敏感性，其高压传感器由于其高的表面与体积比和出色的机械性能。与其他二维材料相比，在不同运输方式上石墨烯的压力较小，其压力敏感性限制了其压力敏感性。使用膜理论和薄膜粘附模型，我们展示了微型化，以增强石墨烯压力传感器的性能。我们的发现表明，弹道石墨烯可以配置为测量超高压力（10^9 pa），其单位面积的灵敏度比准石墨烯，扩散石墨烯和薄层过渡金属二分法层高得多。基于这些发现，我们提出了一系列具有极高压力灵敏度和超高压范围的弹道石墨烯传感器，这些传感器将在下一代NEMS压力传感器中找到应用。可以进一步增强阵列传感器的性能参数，从而减少石墨烯膜的大小并增加阵列中的传感器数量。本文开发的方法可用于使用其他二维材料探索类似的应用。
Atomically thin two-dimensional materials such as graphene exhibit extremely high-pressure sensitivity compared to the commercially used pressure sensors due to their high surface-to-volume ratio and excellent mechanical properties. The smaller piezoresistance of graphene across different transport regimes limits its pressure sensitivity compared to other two-dimensional materials. Using membrane theory and thin-film adhesivity model, we show miniaturization as means to enhance theoverall performance of graphene pressure sensors. Our findings reveal that ballistic graphene canbe configured to measure ultra-high pressure (10^9 Pa) with many-fold higher sensitivity per unit area than quasi-ballistic graphene, diffusive graphene, and thin layers of transition metal dichalcogenides. Based on these findings, we propose an array of ballistic graphene sensors with extremely high-pressure sensitivity and ultra high-pressure range that will find applications in next-generation NEMS pressure sensors. The performance parameters of the array sensors can be further enhancedby reducing the size of graphene membranes and increasing the number of sensors in the array. The methodology developed in this paper can be used to explore similar applications using other two-dimensional materials.
