论文标题

无污染的电子透明金属样品制备方法,用于MEMS实验

A contamination-free electron-transparent metallic sample preparation method for MEMS experiments with in situ S/TEM

论文作者

Tunes, Matheus A., Quick, Cameron, Stemper, Lukas, Coradini, Diego S. R., Grasserbauer, Jakob, Dumitraschkewitz, Phillip, Kremmer, Thomas M., Pogatscher, Stefan

论文摘要

当前,微电机力学系统(MEMS)正在支持材料科学和冶金学领域的开创性基础研究,因为它们允许在各种不同条件下进行电子 - 微观镜中的纳米级材料进行现场实验,例如超快材料动力学,例如超快加热和淬火率,以及在复杂的电动电动环境中以及在复杂的电动环境中的稳定性。 MEMS电子芯片的电子透明样品制备仍然是该技术的挑战,因为现有方法可以引入污染物,从而破坏了实验和结果分析。本文中,我们介绍了一种方法,用于简单而快速的电子透明样品准备MEMS E-CHIP,而没有明显的污染。在MEMS E-ChIP实验中,在电子 - 微观镜内的原位进行了样品的质量以及它们的性能。

Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron-microscopes in a wide variety of different conditions such as extreme materials dynamics under ultrafast heating and quenching rates as well as in complex electro-chemical environments. Electron-transparent sample preparation for MEMS e-chips remains a challenge for this technology as the existing methodologies can introduce contaminants, thus disrupting the experiments and the analysis of results. Herein we introduce a methodology for simple and fast electron-transparent sample preparation for MEMS e-chips without significant contamination. The quality of the samples as well as their performance during a MEMS e-chip experiment in situ within an electron-microscope are evaluated during a heat treatment of a crossover AlMgZn(Cu) alloy.

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