论文标题
电感耦合等离子体的皮肤层中的离子声湍流
The ion-acoustic turbulence in the skin layer of the inductively coupled plasma
论文作者
论文摘要
在电感耦合等离子体（ICP）的皮肤层中，非模式的离子声不稳定性的理论是开发的。这种不稳定性具有时间依赖性的生长速率，并由皮肤层中形成的电流驱动，这是由于电子相对于离子的加速运动，在硫化力的作用下。发现皮肤层中离子声湍流（IAT）的发育和通过IAT散射电子是皮肤层中RF能量非线性吸收的基本非线性通道。
The theory of the nonmodal ion-acoustic instability in the skin layer of the inductively coupled plasma (ICP) is developed. This instability has time dependent growth rate and is driven by the current formed in the skin layer by the accelerated motion of electrons relative to ions under the action of the ponderomotive force. It is found that the development of the ion acoustic turbulence (IAT) in the skin layer and the scattering of electrons by IAT are basic nonlinear channels of the nonlinear absorption of the RF energy in the skin layer.
