论文标题
3-D多粒子HF $ _x $ zr $ _ {1-x} $ o $ $ _2 $铁电容器中的可变性分析
Variability Analysis in a 3-D Multi-Granular Hf$_x$Zr$_{1-x}$O$_2$ Ferroelectric Capacitor
论文作者
论文摘要
本文介绍了基于仿真的剩余极化$ \左（p_r \右）$的可变性研究。 Poisson voronoi Tessellation图（PVD）用于Fe区域中晶粒的成核，这与物理生长机制相对应。 MATLAB中实现的PVD算法与TCAD模拟耦合，以追踪铁电磁滞回路。已经发现，与谷物相比，具有$ p_r $线性曲线的谷物在Fe滞后环中显示出更大的可变性，而谷物则遵循$ p_r $的高斯分布。此外，分析了介电含量在Fe晶粒中的影响。可以看出，介电晶粒在Fe磁滞回路中引起很大的可变性。介电晶粒的增加也导致磁滞循环的保留率损失。
A simulation-based study of variability of remnant polarization $\left (P_r \right)$ in a multi-granular 3-D ultra-thin ferroelectric (FE) capacitor is presented in this paper. The Poisson Voronoi Tessellation Diagram (PVD) is used for the nucleation of grains in the FE region, which corresponds to the physical growth mechanism. The PVD algorithm implemented in MATLAB is coupled with TCAD simulations, to trace the ferroelectric hysteresis loop. It is found that the grains which have linear profile of $P_r$ show larger variability in the FE hysteresis loop, compared to the grains, which follow the Gaussian distribution of $P_r$. Additionally, the impact of dielectric content in the FE grains is analyzed. It is seen that the dielectric grains cause very large amount of variability in the FE hysteresis loop. An increase in the dielectric grains also leads to a loss in the retentivity of the hysteresis loop.
