论文标题
薄膜的标量微分方程散装声波谐振器，具有传感器的表面声阻抗
Scalar Differential Equations of Thin Film Bulk Acoustic Wave Resonators with Surface Acoustic Impedance for Sensor Application
论文作者
论文摘要
我们将二维标量微分方程概括为薄膜大量声波谐振器（FBAR）的厚度扩展工作模式（FBAR），以包括表面阻抗的效果，以便可以将方程用于基于FBAR的传感器对传感器进行建模。分析质量传感器作为一个例子，以显示获得的方程的有效性。计算质量层诱导者频率移位。还发现振动可能限制在驱动电极或质量层下。这些是质量传感器设计的基础。
We generalize the two-dimensional scalar differential equations for the thickness-extensional operating modes of thin film bulk acoustic wave resonators (FBARs) to include the effects of surface impedance so that the equations can be used to model sensors based on FBARs. A mass sensor is analyzed as an example to show the effectiveness of the equations obtained. The mass layer inducer frequency shifts are calculated. It is also found that the vibration may be confined under the driving electrode or the mass layer. These are fundamental to mass sensor design.
