论文标题
使用经过异常校正的贝塞尔样梁的高质量量身定制的边缘分裂
High-quality Tailored-edge Cleaving Using Aberration-corrected Bessel-like Beams
论文作者
论文摘要
我们报告了超短激光脉冲的使用形式,形式是通过像差校正的贝塞尔样梁,用于用斜角切割玻璃的激光切割。我们的方法可以预见,就处理光学元件而言,材料的入口表面倾斜。通过倾斜玻璃表面的光束过渡引起的相变的详细分析,可以使用数字全息图预加密的像差。我们通过泵探针显微镜验证理论考虑,并在非强度硅酸盐玻璃中呈现高质量的边缘。
We report on the usage of ultrashort laser pulses in form of aberration-corrected Bessel-like beams for laser cutting of glass with bevels. Our approach foresees to incline the material's entrance surface with respect to the processing optics. The detailed analysis of phase distortions caused by the beam transition through the tilted glass surface allows to pre-compensate occurring aberrations using digital holography. We verify theoretical considerations by means of pump-probe microscopy and present high-quality edges in non-strengthened silicate glass.