论文标题
大面积光栅的制造开发，用于从平面梁耦合中
Fabrication Development of a Large Area Grating for Out of Plane Beam Coupling
论文作者
论文摘要
我们开发一个单层波导表面光栅结构，以垂直夫妇在红外（NIR）光线（NIR）光线附近，距离大面积（〜100 um长度尺度）在硅启动器（SOI）基板上，从大面积（〜100 um长度尺度）si波导，用于自由空间，以适用于高功率激光应用的自由空间。我们的设计方法基于局部发射角度和外耦合强度的优化。仿真结果表明，在所需的焦点位置可以实现1/E2宽度为3.82 UM的焦点，其中33％（-4.81 dB）模拟的源以自由空间聚焦效率，而初始测量结果显示效率为22％（-6.58 dB）。
We develop a single-layer waveguide surface grating structure to vertically couple near infrared (NIR) light at ~1.55 um wavelength from a large area (~100 um length scale) Si waveguide on a Silicon-On-Insulator (SOI) substrates to free-space for high-power laser applications. Our design approach is based on the optimization of local emission angles and the out-coupling intensities. Simulation results show that a focal spot with a 1/e2 width of 3.82 um can be achieved at the desired focal position, with 33% (-4.81 dB) simulated source to free-space focusing efficiency, while initial measurements show an efficiency of 22% (-6.58 dB).
