论文标题
纳米结构ALN膜中弹性特性的结构演变
Structural evolution of the elastic properties in nano-structured AlN film
论文作者
论文摘要
通过使用高分辨率微奶油素光谱法进行了对纳米结构ALN膜上横向声音子的研究。密集的膜通过室温下在超高真空下的射频（R.F.）磁控溅射沉积。通过透射电子显微镜和布里渊光谱（等纳米大小，纳米柱晶粒和无定形相）制备具有不同形态的膜。结果显示横向模式对纳米结构的依赖性。纳米柱膜表现出两种横向模式，如Aln W {ü} rtzite所预期的，而等词的纳米尺寸和无定形膜仅按预期的是无定形材料中预期的各向同性横向模式。一个重要的结果是，ALN无定形相中的声音传播速度高于非纹理的纳米晶相。然而，这种现象已经在铁电陶瓷中观察到。
A study of the transverse acoustic phonons on nano-structured AlN films has been carried out by using high-resolution micro-Brillouin spectroscopy. Dense films have been deposited by radio frequency (r.f.) magnetron sputtering under ultra high vacuum at room temperature. Films with different morphologies were prepared and investigated by transmission electron microscopy and Brillouin Spectroscopy (equiaxed nano-sized, nano-columnar grains and amorphous phase). Results show a dependence of the transverse modes on the nano-structure. The nano-columnar film exhibits two transversal modes as expected for the AlN w{ü}rtzite while the equiaxed nano-sized and the amorphous films only exhibit one isotropic transverse mode as expected in amorphous materials. One important result is that the sound propagation velocity in the AlN amorphous phase is higher than the one in the non-textured nano-crystalline phase. This phenomenon has, however, already been observed in ferroelectric ceramics.
