论文标题
使用有和没有等离子体接触的动力电极的DBD等离子体喷气机的性质
Properties of DBD Plasma Jets using Powered Electrode With and Without Contact with the Plasma
论文作者
论文摘要
在这项工作中报道了一项实验研究，比较了使用带有和没有介电屏障的电力电极在介电屏障放电（DBD）配置中等离子隔离层构型（DBD）构型的实验研究，同时在这项工作中报道了在接地电极上保持第二个介电屏障。为此，使用了两个不同的功率来源来产生等离子体喷射，其中一个产生了脉冲高压（HV）输出，另一个产生了脉冲样HV输出，该输出由阻尼的Sine HV波形组成。使用氩气和氦作为工作气体进行了血浆参数的测量。结果，如果使用了脉冲电源，则在从一种配置转换为另一种配置时，在放电功率（$ p_ {polasma} $），旋转和振动温度（分别$ t_r $和$ t_v $）中发现了显着差异。另一方面，在切换电极配置时，仅使用类似脉冲的hv $ p_ {polasma} $参数会带来显着差异。 For the pulsed source it has been observed that despite the remarkable increase in $P_{plasma}$ when changing from the double barrier configuration to the single barrier one, the values obtained for $T_r$ and $T_v$ also increased, but not in the same proportion as the increase in $P_{plasma}$, which suggests a non-linear dependency between temperatures and discharge power in the plasma jet.作为在两种配置中应用等离子体的应用的一个例子，进行了试图去除沉积在氧化铝基板上的铜膜的测试，因此，仅当动力电极与等离子体接触时，才有大量的材料去除。总的来说，如果某些应用程序确实需要更高的功率，则最好使用此配置。
An experimental investigation comparing the properties of plasma jets in dielectric barrier discharge (DBD) configurations using a powered electrode with and without a dielectric barrier, while keeping a second dielectric barrier over the grounded electrode, is reported in this work. For this purpose, two different power sources were used to produce the plasma jets, with one of them producing a pulsed high-voltage (HV) output and the other one producing a pulse-like HV output, which consists of a damped sine HV waveform. Measurements of plasma parameters were performed for both configurations using argon and helium as working gases. As a result, if the pulsed power source is used, significant differences were found in discharge power ($P_{plasma}$), rotational and vibrational temperatures ($T_r$ and $T_v$, respectively) when switching from one configuration to the other. On the other hand, using the pulse-like HV only the $P_{plasma}$ parameter presented significant differences when switching the electrode's configuration. For the pulsed source it has been observed that despite the remarkable increase in $P_{plasma}$ when changing from the double barrier configuration to the single barrier one, the values obtained for $T_r$ and $T_v$ also increased, but not in the same proportion as the increase in $P_{plasma}$, which suggests a non-linear dependency between temperatures and discharge power in the plasma jet. As an example for application of plasmas in both configurations, tests in an attempt to remove copper films deposited on alumina substrates were performed and, as a result, there was significant material removal only when the powered electrode was in contact with the plasma. As a general conclusion, if higher power is really required for some application it is better to use this configuration.
