论文标题
硝酸钛和铝超导谐振器中介电损失的比较
Comparison of Dielectric Loss in Titanium Nitride and Aluminum Superconducting Resonators
论文作者
论文摘要
有损耗的电介质是超导量子电路的重叠的重要来源。在本报告中，我们对硝酸钛（TIN）和铝（AL）超导Coclanar波导（CPW）谐振器中的散装和界面介电介质的介电损失进行了建模。我们制造了各向同性的凹凸谐振器，以产生一系列的设备几何形状，这些几何形状突显了特定的介电区域对谐振器质量因子的贡献。虽然每个介电区域在锡设备中损失显着贡献，但金属空气界面占主导地位的AL设备损耗。此外，我们在有或没有后处理的氢氟（HF）蚀刻中评估了每个TIN谐振几何形状的质量因子，并发现它减少了基板空气界面的损失，从而提高了质量因子。
Lossy dielectrics are a significant source of decoherence in superconducting quantum circuits. In this report, we model and compare the dielectric loss in bulk and interfacial dielectrics in titanium nitride (TiN) and aluminum (Al) superconducting coplanar waveguide (CPW) resonators. We fabricate isotropically trenched resonators to produce a series of device geometries that accentuate a specific dielectric region's contribution to resonator quality factor. While each dielectric region contributes significantly to loss in TiN devices, the metal-air interface dominates the loss in the Al devices. Furthermore, we evaluate the quality factor of each TiN resonator geometry with and without a post-process hydrofluoric (HF) etch, and find that it reduced losses from the substrate-air interface, thereby improving the quality factor.
