论文标题
等离子间作为制造工具
Plasmonics as a fabrication tool
论文作者
论文摘要
等离子体纳米光刻是一种纳米化技术，可利用表面等离子体生成细分划分模式。在这篇综述中，我们重点介绍了等离激元纳米印刷的关键概念，回顾开创性论文，并提供了一个分类，该分类对于确定适当的方法和工具来确定子划分图案的适当方法。考虑到等离子体学领域的持续发展，使用表面等离子体的光刻是一种非常有前途的高通量纳米制作技术的方法。
Plasmonic nanolithography is a nanofabrication technique which exploits surface plasmons to generate subdiffraction patterns. In this review, we highlight the key concepts in plasmonic nanolithography, review the pioneering papers and provide a classification that can be useful in determining the proper method and tool for subdiffraction patterning. Considering the ongoing developments in the field of plasmonics, lithography using surface plasmons is an extremely promising approach for development of high-throughput nanofabrication techniques.
