论文标题
O波段亚波长光滤波器中的单片光子技术
O-Band Subwavelength Grating Filters in a Monolithic Photonics Technology
论文作者
论文摘要
数据通信行业已开始从数据中心中的电气互连到光学互连，以克服绩效瓶颈并满足消费者的需求。为了减轻与此变化相关的成本并实现5G及以后的性能，探索可以通过光子积分电路中的波长 - 分区多路复用（WDM）启用高带宽互连的高级光子设备至关重要。亚波长度光栅（SWG）过滤器对WDM应用显示了很大的希望。但是，实施这些结构所需的小特征大小禁止它们穿透工业应用。为了探索在工业环境中SWG过滤器的可制造性和性能，我们使用GlobalFoundries（GF）的单片光子技术技术制造和表征O波段亚波长光栅过滤器。我们证明了较低的下降通道损失为-1.2 dB，具有平坦的响应，高灭绝比为-30 dB，3 dB通道宽度为5 nm，单源热可调性，而没有形状失真。该滤波器结构是使用GF提供的产品设计套件的元素设计的，功能是0.002 mm2的紧凑型足迹，最小特征大小为150 nm。
The data communications industry has begun transitioning from electrical to optical interconnects in datacenters in order to overcome performance bottlenecks and meet consumer needs. To mitigate the costs associated with this change and achieve performance for 5G and beyond, it is crucial to explore advanced photonic devices that can enable high-bandwidth interconnects via wavelength-division multiplexing (WDM) in photonic integrated circuits. Subwavelength grating (SWG) filters have shown great promise for WDM applications. However, the small feature sizes necessary to implement these structures have prohibited them from penetrating into industrial applications. To explore the manufacturability and performance of SWG filters in an industrial setting, we fabricate and characterize O-band subwavelength grating filters using the monolithic photonics technology at GLOBALFOUNDRIES (GF). We demonstrate a low drop channel loss of -1.2 dB with a flat-top response, a high extinction ratio of -30 dB, a 3 dB channel width of 5 nm and single-source thermal tunability without shape distortion. This filter structure was designed using elements from the product design kit provided by GF and functions in a compact footprint of 0.002 mm2 with a minimum feature size of 150 nm.
