论文标题
选择性调整硅梳状光子晶体腔中光学模式
Selective tuning of optical modes in a silicon comb-like photonic crystal cavity
论文作者
论文摘要
实现具有较大游离光谱范围的乘积谐振光子晶体腔是实现具有高效非线性响应的集成设备的关键,例如频率转换,四波混合和参数振荡。由于腔模式对制造障碍的敏感性,这项任务通常很困难,这使得即使在理论上预测了完美的匹配,也很难可靠地实现同样间隔模式的梳状频谱。在这里,我们表明,具有高质量因子和衍射有限体积的多达8个模式的梳状光谱可以在二维光子晶体腔的双型型电势中进行设计,该二维光子晶体空腔在薄硅膜上制造。为了应对频率间距和共振线宽的紧密公差,我们开发了一种永久的后加工技术,可以选择性调整单个限制模式的选择性调整,从而实现了高Q共振与硅微孔子中纪录的Finesse的几乎完美频率匹配。鉴于硅中的超低功率非线性光子学,我们的实验结果非常有前途。
Realizing multiply resonant photonic crystal cavities with large free spectral range is key to achieve integrated devices with highly efficient nonlinear response, such as frequency conversion, four-wave mixing, and parametric oscillation. This task is typically difficult owing to the cavity modes' sensitivity to fabrication disorder, which makes it hard to reliably achieve a comb-like spectrum of equally spaced modes even when a perfect matching is theoretically predicted. Here we show that a comb-like spectrum of up to 8 modes with very high quality factor and diffraction limited volumes can be engineered in the bichromatic-type potential of a two-dimensional photonic crystal cavity fabricated in a thin silicon membrane. To cope with the tight tolerance in terms of frequency spacings and resonance linewidths, we develop a permanent post-processing technique that allows the selective tuning of individual confined modes, thus achieving an almost perfect frequency matching of high Q resonances with record finesse in silicon microresonators. Our experimental results are extremely promising in view of ultra-low power nonlinear photonics in silicon.