论文标题
在负离子存在下磁化等离子体鞘
Magnetized Plasma Sheath in the Presence of Negative Ions
论文作者
论文摘要
使用流体动力方程式，已经在数值上研究了由电子，负和正离子组成的弱磁化无碰撞电源等离子体中的鞘形成。假定电子和负离子遵循Boltzmann的关系。已经通过分析得出了鞘形成标准。本文着重于通过改变电负性来研究护套结构。已经观察到，负离子的存在对护套结构具有重大影响。本工作中的观察结果对处理等离子体具有深远的意义，尤其是在半导体行业以及融合研究中。
The sheath formation in a weakly magnetized collisionless electronegative plasma consisting of electrons, negative and positive ions has been numerically investigated using the hydrodynamic equations. The electrons and negative ions are assumed to follow Boltzmann relation. A sheath formation criterion has been analytically derived. The paper focuses on studying the sheath structure by varying the electronegativity. It has been observed that the presence of negative ions has a substantial effect on the sheath structure. The observations made in the present work have profound significance on processing plasmas, especially in the semiconductor industry as well as in fusion studies.
