论文标题
MEMS陀螺仪中驱动模式振幅不稳定性的非线性动力学系统模型
Nonlinear Dynamical System Model for Drive Mode Amplitude Instabilities in MEMS Gyroscopes
论文作者
论文摘要
随着车辆定位的系统的出现，与微电力机电传感器的可靠性和准确性有关的要求正在增加，这是自动驾驶的有助于因素。由于微电动机电系统（MEMS）成为一种成熟的技术，因此用于预测其行为的建模技术从主要的线性方法扩展到包括非线性动态效应。这导致人们对限制MEMS传感器性能的各种非线性现象的了解增加了。在这项工作中，我们开发了两个非线性耦合机械模式的模型，并采用它来解释MEMS陀螺仪中测得的驱动模式不稳定性。由于驱动模式和寄生模式之间的3：1内部共振，保守系统内的能量转移发生。从显示出滞后效应的振幅响应曲线的测量值，我们提取所有非线性系统参数，并得出结论，稳态模型需要通过瞬态模拟扩展，以充分解释测得的系统行为。
The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical systems (MEMS) became a mature technology, the modelling techniques used for predicting their behaviour expanded from mostly linear approaches to include nonlinear dynamic effects. This leads to an increased understanding of the various nonlinear phenomena that limit the performance of MEMS sensors. In this work, we develop a model of two nonlinearly coupled mechanical modes and employ it to explain measured drive mode instabilities in MEMS gyroscopes. Due to 3:1 internal resonance between the drive mode and a parasitic mode, energy transfer within the conservative system occurs. From measurements of amplitude response curves showing hysteresis effects, we extract all nonlinear system parameters and conclude that the steady-state model needs to be expanded by a transient simulation in order to fully explain the measured system behaviour.
